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Gas Mixing Station
the Gas Mixing Station the process
gases (typically N2, H2, CO2+CO)
are mixed and then fed into the Process
Chambers. Optionally NH3, CH4, Ar, O2
can be used.
The Gas Flows / Volumes as well as the
mixing ratio are set at the PC and controlled
by Thermo Mass Flow Controllers (TMFC´s).
premixed gases are fed into the
Process Chambers directly or through a
Humidification System to achieve the
desired dew points for Reduction and
A Gas Sensor, calibrated for combustible
gases, would detect leakages in the Gas
Mixing Station. In such unlikely case the
Simulator is set into a safe status.